This part of GB/T 19067 specifies the term definitions of F1 and F2 software measurement standards for calibration software of measuring instruments. This part also specifies the file format of the F1 type software measurement standard. This part applies to the measurement standards for the calibration of metrological characteristics of surface structure measuring instruments based on the profilometry method defined in GB/T 6062-2002. Appendix A gives examples of file formats.