This International Standard specifies methods for calibrating the magnification of scanning electron microscope (SEM) images using appropriate reference substances. This standard is limited to the calibration of magnifications due to the range of pitch sizes on the reference material. This standard does not apply to special-purpose length-measuring scanning electron microscopes.
GB/T 27788-2011 Referenced Document
GB/T 6379.1-2004 Accuracy(trueness and precision)of measurement methods and results Part 1:General principles and definitions
ISO Guide 34:1996 Quality system guidelines for the production of reference materials
ISO Guide 35:1989 Certification of reference materials - General and statistical principles
ISO/IEC 17025:1999 General requirements for the competence of testing and calibration laboratories
JIS Q 0030:1997 Terms and definitions used in connection with reference materials
GB/T 27788-2011 history
2020GB/T 27788-2020 Microbeam analysis—Scanning electron microscopy—Guidelines for calibrating image magnification
2011GB/T 27788-2011 Microbeam analysis.Scanning electron microscopy.Guidelines for calibrating image magnification