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Silicon content in silane

Silicon content in silane, Total:5 items.

In the international standard classification, Silicon content in silane involves: Testing of metals.


Inner Mongolia Provincial Standard of the People's Republic of China, Silicon content in silane

  • DB15/T 1241-2017 Determination of silane content in tail gas of polysilicon produced by silane method Gas chromatography
  • DB15/T 1242-2017 Determination of hexachlorosiloxane content in chlorosilane gas chromatography-mass spectrometry

工业和信息化部, Silicon content in silane

  • YS/T 1290-2018 Determination of silane content in polycrystalline silicon production tail gas by gas chromatography
  • YS/T 1060-2015 Determination of other chlorosilanes in trichlorosilane for silicon epitaxy by gas chromatography

Group Standards of the People's Republic of China, Silicon content in silane

  • T/CNIA 0017-2019 Determination of Impurity Content in Chlorosilanes for Polysilicon by Inductively Coupled Plasma Mass Spectrometry




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