ISO/TR 14999-3-2005
光学和光子学.光学元件和光学系统的干涉仪测量.第3部分:干涉仪试验设备和测量的校准和验证
Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 3: Calibration and validation of interferometric test equipment and measurements
哪些标准引用了ISO/TR 14999-3-2005
找不到引用ISO/TR 14999-3-2005 光学和光子学.光学元件和光学系统的干涉仪测量.第3部分:干涉仪试验设备和测量的校准和验证 的标准
- 适用范围
- This part of ISO 14999 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.