Chemically accelerated vibratory finishing eliminates wear and contact fatigue@ resulting in gears surviving higher power densities for a longer life compared to traditional finishes. Studies have confirmed this process is metallurgically safe for both through hardened and case carburized alloy steels. The superfinish can achieve an Ra < 1.5 uinch@ while maintaining tolerance levels. Metrology@ topography@ scanning election microscopy@ hydrogen embrittlement@ contact fatigue and lubrication results are presented.