Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin films under room temperature (Edition 1.0)
This part of IEC 62047 specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS@ opto-electronics@ and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation@ and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic@ homogeneous@ and linearly viscoelastic materials.