62659-2015

Nanomanufacturing - Large scale manufacturing for nanoelectronics (Edition 1.0)


 

 

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标准号
62659-2015
发布日期
2015年09月01日
实施日期
2015年10月02日
废止日期
中国标准分类号
/
国际标准分类号
/
发布单位
IEC - International Electrotechnical Commission
引用标准
16
适用范围
This International Standard provides a framework for introducing nanoelectronics into large scale@ high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes@ graphene@ quantum dots@ etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields@ there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way. This International Standard provides steps employed to facilitate the introduction of nanomaterials into the semiconductor manufacturing facilities. This sequence is described below under the areas of raw materials acquisition@ materials processing@ design@ IC fabrication@ testing@ and end-use. These activities represent the major stages of the supply chain in semiconductor manufacturing facilities.




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