UNE-EN ISO 25178-604:2013 几何产品规格(GPS)表面纹理:面积 第604部分:非接触式(相干扫描干涉测量)仪器的标称特性
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013) (Endorsed by AENOR in January of 2015.)