What is ISO 11952 - Scanning-probe microscopy about?
ISO 11952 is applicable for s canning-probe microscopy.
ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations.
Note-
It is not intended for general industrial use, where a lower level of calibration might be required.
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