prEN ISO 25178-603
几何产品规格 (GPS) 表面纹理:面 第603部分:非接触式(相移干涉测量)仪器的设计和特性 (ISO/DIS 25178-603:2023)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178‑603:2023)