62047-32-2019 Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators (Edition 1.0)
Dispositifs à semiconducteurs – Dispositifs microélectromécaniques – Partie 32: Méthode d’essai pour la vibration non linéaire des résonateurs MEMS (Edition 1.0)
Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators (Edition 1.0) 是非强制性国家标准,您可以免费下载前三页
This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.