ANSI/IEST/ISO 14644-8:2006
洁净室及其相关控制环境.第8部分:空气传播分子污染物分类

Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination

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标准号

ANSI/IEST/ISO 14644-8:2006

发布

2006年

发布单位

美国国家标准学会

当前最新

ANSI/IEST/ISO 14644-8:2006

 

 

适用范围

This part of ISO 14644 covers the classification of airborne molecular contamination (AMC)in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification. (Full scope as presented in Standard includes additional limitations).

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