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mems technology Mems microstructure in-plane length measurement method based on optical interference

mems technology Mems microstructure in-plane length measurement method based on optical interference, Total:1 items.

In the international standard classification, mems technology Mems microstructure in-plane length measurement method based on optical interference involves: Integrated circuits. Microelectronics.

中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会, mems technology Mems microstructure in-plane length measurement method based on optical interference

GB/T 34893-2017 Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer