ZH
RU
ES

ion sputtering

ion sputtering, Total:10 items.

In the international standard classification, ion sputtering involves: Vacuum technology, Analytical chemistry, Semiconducting materials.

Professional Standard - Electron, ion sputtering

• SJ 1781-1981 Sputtering ion pump--Testing methods

Professional Standard - Machinery, ion sputtering

• JB/T 2965-1992 Performance testing method of sputtering ion pump

American Society for Testing and Materials (ASTM), ion sputtering

• ASTM E1162-87(2001) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
• ASTM E1162-87(1996) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
• ASTM E1438-91(2001) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
• ASTM E1438-91(1996) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
• ASTM E1162-11(2019) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
• ASTM E1162-06 Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)

British Standards Institution (BSI), ion sputtering

• BS ISO 17109:2015 Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

International Organization for Standardization (ISO), ion sputtering

• ISO 17109:2015 Surface chemical analysis - Depth profiling - Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

Others:   ion sputtering, gold ion sputtering.