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Diffusion Furnace

Diffusion Furnace, Total:8 items.

In the international standard classification, Diffusion Furnace involves: .


Professional Standard - Electron, Diffusion Furnace

  • SJ/T 11451-2022 Diffusion Furnace Energy Consumption Specifications
  • SJ/T 11451-2013 Diffusion Furnace Energy Consumption Specifications
  • SJ 2065-1982 Testing method for diffusion furnace for semiconductor device manufacturing
  • SJ/T 31131-1994 Requirements of readiness and methods of inspection and assessment for Type 4304 diffusion furnaces
  • SJ 1794-1981 General specification for diffusion furnace for semiconductor device manufacturing
  • SJ/T 31132-1994 Requirements of readiness and methods of inspection and assessment for ASM microcomputer-controlled diffusion furnaces
  • SJ/T 11883-2022 The Calculation Method of Heat Balance, Heat Efficiency and Comprehensive Energy Consumption of Diffusion Furnace

Professional Standard - Machinery, Diffusion Furnace

  • JB/T 5630-1991 Diffusion furnace for semiconductor devices. Grading of energy consumption




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