日本电子RF-120系列高频电源

• RF-120系列高频电源

• 是溅射、刻蚀、CVD、离子镀等薄膜制备/加工使用的、用于生成等离子体的13.56MHz高频电源（RF电源）。

RF-120 RF Generator for thin film production, obtains 13.56 MHz plasma yield during operations of processing thin sheets, which involves etching, sputtering, chemical vapor deposition and ion plating. It acquires its power reserve from a radio frequency source, resulting to a high frequency output. It is equipped with standard configurations of DeviceNet, RS232C, and analog interfaces. This flexible power supplies deliver functions for pattern machining, arc cutting, counting and management, and storage of data history. A comprehensive network integration is used to monitor the connection between devices, regulating each tool’s operational tasks..
rf-120射频发生器生产薄膜，得到13.56 MHz等离子体收率加工薄板操作过程中，包括蚀刻，溅射，化学气相沉积和离子镀。获得其功率储备从无线电频率源，产生一个高频输出。它配备了DeviceNet，RS232C标准配置，和模拟接口。这种灵活的电源提供的函数图形加工，切割，统计和管理，以及历史数据的存储。一个全面的网络集成用于监控设备之间的连接，调节各工具的操作任务。
It accommodates a maximum of three patterns, each containing 5 point ratio. It also has an automated output monitor, which helps control the procedures that are being carried out.
它可容纳zei多三个模式，每个包含5点比。它也有一个自动输出监控，这有助于控制正在执行的程序。

特性：

A high-frequency power supply (RF power supply) creating 13.56 MHz plasma for thin-film processing and etching, including sputtering, etching, CVD, and ion plating.

The RF-120 series includes DeviceNet, RS232C, and analog interfaces as standard. These are multi-functional powers supplies that offer performance like pattern operation, arcing cut/count functions, and recall of past data. There is also a matching network to facilitate the combination of each power supply and connected device.

功能：

• Pattern operation
  Automatic output control based on output and time data preset in the RF power supply
  Up to 3 patterns with a maximum of 5 points per pattern can be set

• Arcing cut

• Arcing count
  Counts the number of times that arcing occurs, and halts output when a preset number is reached

• Pulse operation (option)
  Pulse frequency: 100 Hz ~ 10 kHz, duty: 20 ~ 80%
  *A pulse-generator must be purchased separately

• Synchronous operation
  Can be connected to other RF power supplies and operated synchronously

• Slow-start / Slow down

• Reflectance limit continuation control
  When the reflected power limiter is triggered, the elapsed time is measured and when the specified amount of time is reached, output is halted

• Past data memory
  When an abnormality occurs, the internal data from the prior 30 seconds is output

• Matching completion confirmation
  When the reflected power is less than the specified value, a confirmation signal is output

• Arcing cut operation confirmation

• Limiter operation confirmation

• Incident/ Reflected power monitor output

• Input power supply confirmation

• RF output confirmation

• Error check signal output

• Various interfaces supported as standard
  DeviceNet, RS232C, analo

• CE mark compliant (excluding some devices)

选项功能

• Manual operation board  (RF-56000)

• Out-of-phase signal generator (Phase Shifter)

• Water-cooled input terminal (for ion plating)

应用案例