ISO 14644-12:2018
洁净室和相关控制环境.第12部分：通过纳米颗粒浓度监测空气清洁度的规范
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
ISO 14644-12:2018 发布历史
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less – “nanoscale” – are considered. The monitoring given in this document is for use mainly in “operational” states. NOTE 1 For the purposes of this document, reference is made to “nanoscale particles”, which means all nanoobjects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.
ISO 14644-12:2018由国际标准化组织 IX-ISO 发布于 2018-08-00。
ISO 14644-12:2018在国际标准分类中归属于: 13.040.35 清洁室（无菌室）及相关受控环境。
ISO 14644-12:2018的历代版本如下：
- 2018年 ISO 14644-12:2018 洁净室和相关控制环境.第12部分：通过纳米颗粒浓度监测空气清洁度的规范
