ISO 14644-12:2018
洁净室和相关控制环境.第12部分：通过纳米颗粒浓度监测空气清洁度的规范
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
- 标准号
- ISO 14644-12:2018
- 发布
- 2018年
- 中文版
- GB/T 25915.12-2021 (等同采用的中文版本)
- 发布单位
- 国际标准化组织
- 当前最新
- ISO 14644-12:2018
- 适用范围
- This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less – “nanoscale” – are considered. The monitoring given in this document is for use mainly in “operational” states. NOTE 1 For the purposes of this document, reference is made to “nanoscale particles”, which means all nanoobjects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.