DIN EN ISO 14644-1-2016 洁净室和相关控制环境.第1部分:颗粒物浓度的空气洁净度分级(ISO 14644-1-2015).德文版本EN ISO 14644-1-2015
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015); German version EN ISO 14644-1:2015