Metrios TEM透射电镜半导体工业

Metrios TEM

The first TEM dedicated to the semiconductor industry

The FEI Metrios system is the first transmission electron microscope (TEM) dedicated to providing the fast, precise measurements that semiconductor manufacturers need to develop and control their wafer fabrication processes. Extensive automation of the basic TEM operation and measurement procedures minimizes requirements for specialized operator training. Its advanced automated metrology routines deliver greater precision than manual methods. The Metrios TEM is designed to provide customers with improved throughput and lower cost-per-sample than other TEMs.

Metrios SEM for Semiconductors

High volume TEM data, accurate and repeatable

- at the lowest cost-per-sample

Advanced logic and memory manufacturing processes are becoming more reliant on fast turnaround of precise structural and analytical data to be able to quickly calibrate tool sets, diagnose yield excursions and optimize process yields.  At technology nodes below 28nm, especially in cases where non planar device designs are being implemented, conventional SEM or optical based analysis and inspection tools cannot provide useful data. FEI's Metrios TEM automates the basic TEM operation and measurement procedures and minimizes the requirements for specialized operator training. Its advanced automated metrology routines deliver significantly greater precision than manual methods. The Metrios TEM is designed to deliver high volume TEM data, accurate and repeatable operation - at the lowest cost-per-sample.

Metrios TEM

第一个致力于半导体工业的 TEM

Metrios 系统是第一个透射电子显微镜 (TEM), 致力于提供快速, 精确的测量, 半导体制造商需要开发和控制其晶片制造过程。基本的 TEM 操作和测量程序的广泛的自动化zei大限度地减少对专业操作员训练的要求。其先进的自动化计量例程提供了比手动方法更高的精确度。Metrios TEM 的目的是为客户提供更高的吞吐量和更低的每样成本。

半导体 Metrios 透射电子显微镜 

高容量的 TEM 数据, 准确和可重复

-每样成本zei低

先进的逻辑和内存制造过程越来越依赖于精确的结构和分析数据的快速周转, 以便能够快速校准工具集, 诊断出产量漂移, 并优化工艺产量。 在28nm 以下的技术节点上, 特别是在非平面器件设计被实施的情况下, 传统的 SEM 或基于光学的分析和检测工具无法提供有用的数据。Metrios TEM 自动化了基本的 TEM 操作和测量程序, zei大限度地减少了对专业操作人员培训的要求。其先进的自动化计量程序比手工方法提供了更高的精确度。Metrios TEM目的是提供高容量的 TEM据, 准确和可重复的操作-以zei低的成本测试每个样品。

产品型号

半导体工业 Metrios TEM