BS ISO 14644-12:2018
洁净室和相关受控环境 通过纳米级颗粒浓度监测空气清洁度的规范
Cleanrooms and associated controlled environments - Specifications for monitoring air cleanliness by nanoscale particle concentration
- 标准号
- BS ISO 14644-12:2018
- 发布
- 2018年
- 发布单位
- 英国标准学会
- 当前最新
- BS ISO 14644-12:2018
- 适用范围
- 1 Scope This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less – “ nanoscale ” – are considered. The monitoring given in this document is for use mainly in “ operational ” states. NOTE 1 For the purposes of this document, reference is made to “ nanoscale particles”, which means all nano-objects having one (nanoplate), two (nanofibre) or three ( nanoparticle ) dimensions in the nanoscale . NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.