EN ISO 14644-8:2006
洁净室及相关受控环境-第8部分:分类的空气清洁化学浓度(ACC)

Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination


 

 

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标准号
EN ISO 14644-8:2006
发布
2006年
发布单位
CEN - European Committee for Standardization
替代标准
EN ISO 14644-8:2013
当前最新
EN ISO 14644-8:2022
 
 
适用范围
This part of ISO 14644 covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments@ in terms of airborne concentrations of specific chemical substances (individual@ group or category) and provides a protocol to include test methods@ analysis and time weighted factors within the specification for classification. This part of ISO 14644 currently considers only concentrations of AMC between 100 and 10?12 g/m3 under cleanroom operational conditions. This part of ISO 14644 is not relevant for application in those industries@ processes or production@ where the presence of airborne molecular substances is not considered a risk to the product or process. It is not the intention of this part of ISO 14644 to describe the nature of airborne molecular contaminants. This part of ISO 14644 does not give a classification of surface molecular contamination.

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