AS ISO 14644.2:2017
Cleanrooms and associated controlled environments, Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
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- 标准号
- AS ISO 14644.2:2017
- 发布
- 2017年
- 发布单位
- 澳大利亚标准协会
- 当前最新
- AS ISO 14644.2:2017
- 适用范围
- Adopts ISO 14644-2:2015 to specify minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.