Adopts ISO 14644-2:2015 to specify minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
AS ISO 14644.2:2017由澳大利亚标准协会 AU-SA 发布于 2017-12-13,并于 2017-12-13 实施。
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