DIN 50431-1988 半导体材料的试验.用探针直线排列的四探针/直流法测量单晶硅或锗单晶体的电阻率
Testing of semiconductor materials; measurement of the resistivity of silicon or germanium single crystals by means of the four probe/direct current method with collinear array
The standard determines a test method for the measurement of the electrical resistivity of silicon or germanium single crystals by means of the four-point-probe direct current method with collinear four probe array.