ISO 18114-2003
表面化学分析.次级离子质谱法.测定离子注入标样中的相对灵敏度系数
Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials
ISO 18114-2003 中，可能用到以下仪器设备
- 标准号
- ISO 18114-2003
- 发布日期
- 2003年04月
- 实施日期
- 废止日期
- 无
- 中国标准分类号
- G04
- 国际标准分类号
- 71.040.40
- 发布单位
- IX-ISO
- 被代替标准
- ISO/DIS 18114-2002
- 适用范围
- This International Standard specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.