ISO 11952:2014
表面化学分析. 扫描探针显微镜. 使用SPM测定几何量:测量系统校准

Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

被代替

标准号

ISO 11952:2014

发布

2014年

发布单位

国际标准化组织

替代标准

ISO 11952:2019

当前最新

ISO 11952:2019

 

 

引用标准

IEC/TS 62622:2012 ISO 11039:2012 ISO 12179:2000 ISO 12853:1997 ISO 18115-2:2013 ISO 3274:1996 ISO 4287:1997 ISO 4288:1996 ISO 5436-1:2000 ISO Guide 30:1992 ISO Guide 34:2009 ISO/IEC Guide 98-3:2008

适用范围

This International Standard specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This International Standard has the following objectives: — to increase the comparability of measurements of geometrical quantities made using scanningprobe microscopes by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument’s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using a scanning-probe microscope; — to define the requirements for reporting results.

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