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Secondary ion mass spectrometry depth profiling

Secondary ion mass spectrometry depth profiling, Total:7 items.

In the international standard classification, Secondary ion mass spectrometry depth profiling involves: Analytical chemistry.


国家市场监督管理总局、中国国家标准化管理委员会, Secondary ion mass spectrometry depth profiling

  • GB/T 41064-2021 Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
  • GB/T 40109-2021 Surface chemical analysis—Secondary-ion mass spectrometry—Method for depth profiling of boron in silicon

International Organization for Standardization (ISO), Secondary ion mass spectrometry depth profiling

  • ISO 12406:2010 Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of arsenic in silicon
  • ISO 17109:2015 Surface chemical analysis - Depth profiling - Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

British Standards Institution (BSI), Secondary ion mass spectrometry depth profiling

  • BS ISO 12406:2010 Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon
  • BS ISO 17109:2015 Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China, Secondary ion mass spectrometry depth profiling

  • GB/T 32495-2016 Surface chemical analysis.Secondary-ion mass spectrometry.Method for depth profiling of arsenic in silicon




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