真空技术标准-分析测试百科网

KS B 0082-2021 真空技术-图形符号

Vacuum technology-Graphical symbols

ICS: 23.160
CCS
发布: 20210827
实施: 20210827

GSO ISO 20146:2021 真空技术真空计电容隔膜真空计的规格、校准和测量不确定度

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

ICS: 23.160
CCS
发布: 2021-07-01
实施

GSO ISO 3567:2021 真空计通过与参考真空计直接比较进行校准

Vacuum gauges — Calibration by direct comparison with a reference gauge

ICS: 23.160
CCS
发布: 2021-07-01
实施

T/GVS 001-2021 真空镀膜设备电磁兼容屏蔽与辐射安全技术规范

规定了真空镀膜设备电磁屏蔽与辐射安全的术语和定义、材料、技术要求和试验方法。适用于电气工作频率为40 MHz以下的工业用真空镀膜设备（以下简称“设备”）及设备的现场测量。

Vacuum coating plant—Electromagnetic compatibility—Technical specification for shielding and radiation safety

ICS: 23.160
CCS: C344
发布: 2021-06-28
实施: 2021-06-28

T/GVS 003-2021 真空表面处理工艺用离子源

规定了真空表面处理工艺常用离子源的术语和定义、分类、使用条件、技术要求、试验方法、检验规则、标志、包装、运输和贮存。适用于在真空环境下用于表面处理工艺的常用离子源（以下简称离子源）。

Ion source for vacuum surface treatment process

ICS: 23.160
CCS: C344
发布: 2021-06-28
实施: 2021-06-28

T/GVS 002-2021 高精度磁控溅射镀膜设备通用技术要求

规定了高精度磁控溅射镀膜设备的术语和定义、组成、技术要求、试验方法、检验规则、标志、包装、运输和贮存。适用于极限压力在10-5 Pa～10-3 Pa范围的高精度磁控溅射镀膜设备（以下简称“设备”）。

Generic specification for high precision magnetron sputtering coating plant

ICS: 23.160
CCS: C344
发布: 2021-06-28
实施: 2021-06-28

T/ZZB 2103-2021 变螺距螺杆型干式真空泵

本文件规定了变螺距螺杆型干式真空泵的术语和定义、型式与基本参数、基本要求、技术要求、试验方法、检验规则、铭牌、标志、贮存、文件、装箱、包装和运输、质量承诺。本文件适用于变螺距螺杆型干式真空泵（以下简称“真空泵”）。

Variable pitch Screw dry vacuum pump

ICS: 23.160
CCS: C344
发布: 2021-04-24
实施: 2021-05-27

ASTM E834-21 使用冷手指确定真空室气体环境的标准实践

1.1?This practice covers a technique for collecting samples of materials that are part of the residual gas environment of an evacuated vacuum chamber. The practice uses a device designated as a “cold finger” that is placed within the environment to be sampled and is cooled so th

Standard Practice for Determining Vacuum Chamber Gaseous Environment Using a Cold Finger

ICS: 23.160
CCS
发布: 2021-04-01
实施

ASTM E595-15(2021) 在真空环境中排放的总质量损失和收集的挥发性可冷凝材料的标准测试方法

1.1 This test method covers a screening technique to determine volatile content of materials when exposed to a vacuum environment. Two parameters are measured: total mass loss (TML) and collected volatile condensable materials (CVCM). An additional parameter, the amount of water vapor regained (WVR), can also be obtained after completion of exposures and measurements required for TML and CVCM. 1.2 This test method describes the test apparatus and related operating procedures for evaluating the mass loss of materials being subjected to 125 °C at less than 7 × 10−3 Pa (5 × 10−5 torr) for 24 h. The overall mass loss can be classified into noncondensables and condensables. The latter are characterized herein as being capable of condensing on a collector at a temperature of 25°C. NOTE 1—Unless otherwise noted, the tolerance on 25 and 125 °C is 61 °C and on 23 °C is 62 °C. The tolerance on relative humidity is 65 %. 1.3 Many types of organic, polymeric, and inorganic materials can be tested. These include polymer potting compounds, foams, elastomers, films, tapes, insulations, shrink tubings, adhesives, coatings, fabrics, tie cords, and lubricants. The materials may be tested in the “as-received” condition or prepared for test by various curing specifications. 1.4 This test method is primarily a screening technique for materials and is not necessarily valid for computing actual contamination on a system or component because of differences in configuration, temperatures, and material processing. 1.5 The criteria used for the acceptance and rejection of materials shall be determined by the user and based upon specific component and system requirements. Historically, TML of 1.00 % and CVCM of 0.10 % have been used as screening levels for rejection of spacecraft materials. 1.6 The use of materials that are deemed acceptable in accordance with this test method does not ensure that the system or component will remain uncontaminated. Therefore, subsequent functional, developmental, and qualification tests should be used, as necessary, to ensure that the material’s performance is satisfactory. 1.7 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.8 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Standard Test Method for Total Mass Loss and Collected Volatile Condensable Materials from Outgassing in a Vacuum Environment

ICS: 23.160
CCS
发布: 2021-04-01
实施

T/CMIF 117-2020 真空充氮杀虫灭菌设备

随着城市经济、文化和社会的发展，图书、档案、文物、文献资料的重要性愈发凸显。杀虫灭菌是开展档案保护的基础性工作之一，对延长档案寿命具有重要意义。真空充氮是一种新兴有效的档案、文物杀虫灭菌物理方法，安全且无毒害，对书籍、档案和文物等没有明显的不良影响，因此得以广泛推广使用。本文件的制定，旨在规范性能参数的测量方法，确保设备的安全性、可靠性和稳定性，亦为设备的生产、制造提供指导。可推动真空充氮杀虫灭菌设备的技术发展及优化设计，规范该设备的行业发展，也有利于该设备的大范围推广应用。前言　II 引言　III 1　范围　1 2　规范性引用文件　1 3　术语和定义　1 4　设备规格分类　2 5　型式与参数　2 6　基本要求　3 7　技术要求　3 8　试验方法　5 9　检验规则　6 10　标志、包装、运输、贮存　6 附录A（资料性）　档案图书害虫在充氮保压状况下的致死时间　8 参考文献　9

Vacuum Nitrogen Filling Pesticide Sterilization Equipment