ISO 11952:2019
表面化学分析.扫描探针显微镜.用SPM测定几何量:测量系统的校准
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
哪些标准引用了ISO 11952:2019
- 标准号
- ISO 11952:2019
- 发布
- 2019年
- 发布单位
- 国际标准化组织
- 当前最新
- ISO 11952:2019
- 引用标准
- ISO 11039 ISO 18115-2 ISO/IEC Guide 98-3
- 适用范围
- This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument's ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.