This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument's ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.
ISO 11952:2019由国际标准化组织 IX-ISO 发布于 2019-05-21。
ISO 11952:2019在国际标准分类中归属于: 71.040.40 化学分析。
* 在 ISO 11952:2019 发布之后有更新,请注意新发布标准的变化。
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