DIN 50451-4-2007 半导体工艺用材料测试.液体中痕量元素测定.用电感耦合等离子体质谱测定法测定纯净水中34中微量元素
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)
This Standard specifies a test method for the determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS). The method is applicable to mass fractions of elements from 10 ng/kg to 1000 ng/kg.