ISO 17973-2002
表面化学分析.中分辨率螺旋电子光谱仪.元素分析用能量标度的校准

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

标准号

ISO 17973-2002

发布日期

2002年10月

实施日期

废止日期

无

中国标准分类号

N51

国际标准分类号

71.040.40

发布单位

IX-ISO

代替标准

ISO 17973-2016

被代替标准

ISO/DIS 17973-2001

适用范围

This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

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