VDI 2083 Blatt 3-2005
洁净室技术 计量和测试方法

Cleanroom technology - Metrology and test methods

标准号

VDI 2083 Blatt 3-2005

发布

2005年

发布单位

德国机械工程师协会

 

 

引用标准

DI DIN 5035-6:2005 DIN EN 12469:2000 DIN EN 12599:2000 DIN EN 1822-1:1998 DIN EN 1822-2:1998 DIN EN 1822-3:1998 DIN EN 1822-4:2001 DIN EN 1822-5:2001 DIN EN 61672-1:2003 DIN EN ISO 14644-1:1999 DIN EN ISO 7726:2002 DIN EN ISO 9001:2000 DIN V ENV 1631:1997

被代替标准

VDI 2083 Blatt 3-1983 VDI 2083 Blatt 3-2004

适用范围

This guideline specifies measurement procedures for cleanrooms, which are applied during handing over, in the context of the qualification of new installations, for routine checks and for continuous monitoring. The methods described here are tailored to the needs of cleanrooms, thus being different from measurement procedures for other technical systems.

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