GB/T 30701-2014
表面化学分析 硅片工作标准样品表面元素的化学收集方法和全反射X射线荧光光谱法(TXRF)测定
Surface chemical analysis.Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
GBT30701-2014, GB30701-2014