GB/T 25915.13-2022
洁净室及相关受控环境 第13部分:达到粒子和化学洁净度要求的表面清洁
Cleanrooms and associated controlled environments—Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
GBT25915.13-2022, GB25915.13-2022