ISO 22309:2011
微光束分析.用能量扩散光谱测定法(EDS)对原子序数大于等于11(Na)的元素进行定量分析

Microbeam analysis - Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above

ISO 22309:2011 发布历史

This International Standard gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA); any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in this International Standard. This International Standard provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilizing either reference materials or “standardless” procedures. It can be used with confidence for elements with atomic number Z > 10. Guidance on the analysis of light elements with Z < 11 is also given. NOTE With care, mass fractions as low as 0,1 % are measurable when there is no peak overlap and the relevant characteristic line is strongly excited. This International Standard applies principally to quantitative analyses on a flat polished specimen surface. The basic procedures are also applicable to the analysis of specimens that do not have a polished surface but additional uncertainty components will be introduced. There is no accepted method for accurate quantitative EDS analysis of light elements. However, several EDS methods do exist. These are the following: Measuring peak areas and comparing intensities in the same way as for heavier elements. For the reasons explained in Annex D, the uncertainty and inaccuracy associated with the results for light elements will be greater than for the heavier elements. b) Where the light element is known to be combined stoichiometrically with heavier elements (Z > 10) in the specimen, its concentration can be determined by summing the appropriate proportions of concentrations of the other elements. This is often used for the analysis of oxygen in silicate mineral specimens. c) Calculation of concentration by difference where the light element percentage is 100 % minus the percentage sum of the analysed elements. This method is only possible with good beam-current stability and a separate measurement of at least one reference specimen and it requires very accurate analysis of the other elements in the specimen. a) Annex D summarizes the problems of light element analysis, additional to those that exist for quantitative analysis of the heavier elements. If both EDS and wavelength spectrometry (WDS) are available, then WDS can be used to overcome the problems of peak overlap that occur with EDS at low energies. However, many of the other issues are common to both techniques.

ISO 22309:2011由国际标准化组织 IX-ISO 发布于 2011-10。

ISO 22309:2011 在中国标准分类中归属于: N55 其他物质成份分析仪器。

ISO 22309:2011 发布之时，引用了标准

• ISO 14594 微电子束分析.电子探测微观分析.波长色散光谱学用实验参数的测定指南*， 2014-10-01 更新
• ISO 15632:2002 微光束分析.带半导体探测器的能量发散X射线分光仪的仪器规范
• ISO 16700 微电子束分析.扫描电子显微镜.校准图像放大指南*， 2016-08-01 更新
• ISO/IEC 17025:2005 检测和校准实验室能力的一般要求

* 在 ISO 22309:2011 发布之后有更新，请注意新发布标准的变化。

ISO 22309:2011的历代版本如下：

• 2011年 ISO 22309:2011 微光束分析.用能量扩散光谱测定法(EDS)对原子序数大于等于11(Na)的元素进行定量分析
• 2006年 ISO 22309:2006 微电子束分析.用能量散射光谱仪(EDS)进行定量分析

标准号

ISO 22309:2011

发布

2011年

发布单位

国际标准化组织

当前最新

ISO 22309:2011

 

 

引用标准

ISO 14594 ISO 15632:2002 ISO 16700 ISO/IEC 17025:2005

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