400-6699-117转1000
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参考报价: | 面议 | 型号: | EVG®850 TB DB |
品牌: | EVG | 产地: | 奥地利 |
关注度: | 58 | 信息完整度: | |
样本: | 典型用户: | 暂无 |
400-6699-117转1000
产品描述 EVG®850 TB临时键合机 Features Open adhesive platform Various carriers (silicon, glass, sapphire, etc…) Bridge tool capability for different substrate sizes Available with multiple load port options and combinations Recipe controlled system Real time monitoring and recording of all relevant process parameters Fully integrated SECS/GEM interface Optional integrated inline metrology module for automated feedback loop Technical Data Warped wafer handling EVG®850 DB 解键合机 Features Reliable handling of thinned, bowed and warped wafers with and without topography Automated cleaning of debonded wafer Recipe controlled system Real time monitoring and recording of all relevant process parameters Fully integrated SECS/GEM interface in automated tools Bridge tool capability for different substrate sizes Modular tool layout → throughput-optimized depending on specific process Technical DataWafer diameter (substrate size) Up to 300 mm, oversized carrier possible Different substrate / carrier combinations Configuration Coat module Bake module with multiple hot plates Align module with optical or mechanical alignment Bond module Options Inline Metrology ID reading High topography wafer handling
晶圆临时键合机解键合机 信息由上海螣芯电子科技有限公司为您提供,如您想了解更多关于 晶圆临时键合机解键合机 报价、型号、参数等信息,欢迎来电或留言咨询。
注:该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案,不可用于临床诊断或治疗等相关用途