GB/T 36053-2018
X射线反射法测量薄膜的厚度、密度和界面宽度 仪器要求、准直和定位、数据采集、数据分析和报告
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry—Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
GBT36053-2018, GB36053-2018