DIN EN 62047-12:2012
半导体器件.微电机器件.第12部分:使用MEMS结构共振的薄膜材料的弯曲疲劳测试方法(IEC 62047-12-2011).德文版本EN 62047-12-2011
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011