DIN 50450-4-1993 半导体工艺材料的检验.运载气体和掺杂剂气体中杂质的测定.用气相色谱法测定氮气中C1-C3烃类化合物
Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C1-C3-hydrocarbons in nitrogen by gas-chromatography