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Ion sputtering machine

Ion sputtering machine, Total:46 items.

In the international standard classification, Ion sputtering machine involves: Vacuum technology, Analytical chemistry, FLUID SYSTEMS AND COMPONENTS FOR GENERAL USE, Semiconducting materials, Electronic display devices, Products of non-ferrous metals, Electronic tubes, Non-ferrous metals, Pumps, Body care equipment, Electricity. Magnetism. Electrical and magnetic measurements, Linear and angular measurements, Materials for aerospace construction.


Professional Standard - Electron, Ion sputtering machine

  • SJ 1781-1981 Sputtering ion pump--Testing methods
  • SJ 1779-1981 Ordinary two-electrode sputtering ion pump--Parameters series
  • SJ 1780-1981 Ordinary two-electrode sputtering ion pump--Performance specification
  • SJ/T 31273-1994 Requirements of readiness and methods of inspection and assessment for EVP-13480 magnetron sputtering machines

Professional Standard - Machinery, Ion sputtering machine

International Organization for Standardization (ISO), Ion sputtering machine

  • ISO 22415:2019 Surface chemical analysis — Secondary ion mass spectrometry — Method for determining yield volume in argon cluster sputter depth profiling of organic materials
  • ISO 17109:2015 Surface chemical analysis - Depth profiling - Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
  • ISO 17109:2022 Surface chemical analysis — Depth profiling — Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth p

British Standards Institution (BSI), Ion sputtering machine

  • BS ISO 22415:2019 Surface chemical analysis. Secondary ion mass spectrometry. Method for determining yield volume in argon cluster sputter depth profiling of organic materials
  • BS ISO 17109:2015 Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
  • BS ISO 17109:2022 Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin…
  • 21/30433862 DC BS ISO 17109 AMD1. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and…

German Institute for Standardization, Ion sputtering machine

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China, Ion sputtering machine

  • GB/T 25755-2010 Vacuum technology.Sputter-ion pumps.Measurement of performance characteristics
  • GB/T 29658-2013 High-purity sputtering aluminium and aluminium alloy target used in electronic film
  • GB/T 31227-2014 Test method for the surface roughness by atomic force microscope for sputtered thin films

RU-GOST R, Ion sputtering machine

  • GOST 5.1807-1973 Type-GIN-0,5-1M getter-ion pump. Quality requirements of certified products
  • GOST 5.413-1970 The mater cooled diode type sputter-ion pump NMDI-01-1 (NIRD-100) with the power supply BP-150. Quality requirements for certified products

American Society for Testing and Materials (ASTM), Ion sputtering machine

  • ASTM E1162-87(2001) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
  • ASTM E1162-87(1996) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
  • ASTM E1438-91(2001) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
  • ASTM E1438-91(1996) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
  • ASTM F1709-97(2002) Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
  • ASTM F1709-97(2008) Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
  • ASTM E1162-11(2019) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
  • ASTM E1162-06 Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
  • ASTM F1238-95(2003) Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
  • ASTM F1709-97 Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
  • ASTM F1709-97(2016) Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
  • ASTM E684-95(2000) Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
  • ASTM E684-04 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
  • ASTM F1238-95(1999) Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
  • ASTM F1238-95(2011) Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Professional Standard - Non-ferrous Metal, Ion sputtering machine

  • YS/T 819-2012 High-purity sputtering copper target used in electronic film
  • YS/T 893-2013 High-purity sputtering titanium target used in electronic film
  • YS/T 1025-2015 High-purity tungsten and tungsten alloy sputtering target used in electronic film

RO-ASRO, Ion sputtering machine

Group Standards of the People's Republic of China, Ion sputtering machine

国家市场监督管理总局、中国国家标准化管理委员会, Ion sputtering machine

  • GB/T 41064-2021 Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

Society of Automotive Engineers (SAE), Ion sputtering machine





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