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ion sputtering

ion sputtering, Total:7 items.

In the international standard classification, ion sputtering involves: Vacuum technology, Pumps, FLUID SYSTEMS AND COMPONENTS FOR GENERAL USE.

RU-GOST R, ion sputtering

• GOST 5.1807-1973 Type-GIN-0,5-1M getter-ion pump. Quality requirements of certified products
• GOST 5.413-1970 The mater cooled diode type sputter-ion pump NMDI-01-1 (NIRD-100) with the power supply BP-150. Quality requirements for certified products

Professional Standard - Electron, ion sputtering

• SJ 1781-1981 Sputtering ion pump--Testing methods

Professional Standard - Machinery, ion sputtering

• JB/T 4081-2011 Vacuum technology - Sputter ion pump
• JB/T 4082-1991 Sputtering ion pump technical conditions
• JB/T 2965-1992 Performance testing method of sputtering ion pump
• JB/T 4081-1991 Sputtering ion pump type and basic parameters

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