13.040.35 清洁室（无菌室）及相关受控环境 标准查询与下载
共找到 323 条与 清洁室（无菌室）及相关受控环境 相关的标准，共 22 页
1 Scope This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less – “ nanoscale ” – are considered. The monitoring given in this document is for use mainly in “ operational ” states. NOTE 1 For the purposes of this document, reference is made to “ nanoscale particles”, which means all nano-objects having one (nanoplate), two (nanofibre) or three ( nanoparticle ) dimensions in the nanoscale . NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.
Cleanrooms and associated controlled environments - Specifications for monitoring air cleanliness by nanoscale particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2018-09-30
- 实施
- 2018-09-30
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less – “nanoscale” – are considered. The monitoring given in this document is for use mainly in “operational” states. NOTE 1 For the purposes of this document, reference is made to “nanoscale particles”, which means all nanoobjects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2018-08-00
- 实施
Measurement method for volumetric flow rate of Non-CO 2 GHG(CF 4, NF 3, SF 6, N 2 O) in industrial process and display process
- ICS
- 13.040.35
- CCS
- 发布
- 2018-06-19
- 实施
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2018-05-08
- 实施
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2018-05-08
- 实施
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2018-05-08
- 实施
Cleanrooms and associated controlled environments — Part 6: Vocabulary
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 1:Classification of air cleanliness by particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 6: Vocabulary
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments－Part 1：Classification of air cleanliness
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 1:Classification of air cleanliness by particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments — Part 6: Vocabulary
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-26
- 实施
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-12-01
- 实施
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8). The following are outside the scope of this document: — health and safety requirements; — compatibility with cleaning agents and techniques; — cleanability; — biocontamination; — specific requirements of equipment and materials for processes and products; — design details of equipment.
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- ICS
- 13.040.35
- CCS
- 发布
- 2017-10-26
- 实施
Cleanrooms and associated controlled environments. Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- ICS
- 13.040.35
- CCS
- 发布
- 2017-09-08
- 实施
- 2017-09-30
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- ICS
- 13.040.35
- CCS
- 发布
- 2017-08-01
- 实施
Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- ICS
- 13.040.35
- CCS
- 发布
- 2017-07-11
- 实施
