DIN 50451-3-2014 半导体工艺用材料测试. 液体中痕量元素测定. 第3部分: 使用电感耦合等离子体质谱法 (ICP-MS) 测定高纯度硝酸中的31种元素
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS