This part of IEC 62047 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors@ which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors@ RF MEMS@ excluding optical MEMS@ bio MEMS@ micro TAS@ and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical@ optical@ mechanical and environmental characteristics. This part of IEC 62047 aids in the preparation of standards that define devices and systems made by micromachining technology@ including but not limited to@ material characterization and handling@ assembly and testing@ process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However@ the statements made in this standard are also applicable to MEMS using materials other than semiconductor@ for example@ polymers@ glass@ metals and ceramic materials.