DIN EN 62047-10-2012 半导体器件.微电子机械器件.第10部分:MEMES材料微极压缩试验(IEC 62047-10-2011).德文版本 EN 62047-10-2011
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (IEC 62047-10:2011); German version EN 62047-10:2011