DIN EN ISO 14644-9-2008 洁净室和相关控制环境. 第9部分:微粒浓度法进行表面洁净度分类 (ISO/DIS 14644-9-2008); 德文版本prEN ISO 14644-9-2008
Cleanrooms and associated controlled environments - Part 9: Classification of surface particle cleanliness (ISO/DIS 14644-9:2008); German version prEN ISO 14644-9:2008